Lumentum宣布在线拍卖美国加州8吋PLC平面光波导晶圆生产线

6月15日消息，全球光器件大厂Lumentum近日宣布，其将通过在线拍卖的形式，出售一条完整的8吋PLC (Planar Lightwave Circuit) 平面光波导晶圆生产线。

具体情况如下：

交易方式：在线拍卖

资产位于：美国，加州

主要设备：

- Applied Materials 5200 Centura Dry Etch Cluster Tool, 3 Process Chambers + Clean

- Applied Materials 5200 Centura Dry Oxide Etch Cluster Tool, Dual Process Chambers

- Applied Materials HP Centura PVD Cluster Tool, Dual Process Chambers + Cooling & Clean

- Novellus Concept Two Sequel CVD Cluster Tool, Dual Oxide Deposition Process Chambers

- (2) Canon FPA-3000iW Fine Pattern Aligner

- (2) Watkins-Johnson WJ-1000H-3.1/CE APCVD Tool

- (2) Expertech SCAB Triple-Tube Annealing Furnace

- Cosmos Factory BLUE Dual-Tube Annealing Furnace

- Mattson Technology Aspen II Diode Plasma Asher System

- Semitool SST F 221 280G Spray Solvent Tool

- Verteq Nitride Wet Processing Station, 6 Tank + Wash/Rinse/Dry, Dual Robotic Wafer Rack Handler

- Verteq Oxide Wet Processing Station, 6 Tank + Wash/Rinse/Dry, Dual Robotic Wafer Rack Handler

- CHA Mark-40C RH PC/PLC Vacuum Evaporator

- SUSS MicroTec MA-200 Compact Mask Aligner

- SVG 90 Coat/Develop Track Tool

- C&D Semiconductor P9000 Coat/Develop Tool

- Tencor FLX-2320 Film Stress Measurement Tool

- Tencor P-12 Disk Profiler

- Electroglas 3001X Prober

- Scientific Computing International FilmTek 4000-A Multiple Layer Thickness Measurement Tool

- KLA-Tencor Surfscan 6400 Film Surface Analysis System

- Veeco GXRS System XR X-Ray Thickness & Composition Measurement Tool

- Nanometrics 8000X Film Thickness Analyzer

- Inspectrology IVS-165 CD Measurement Tool

- Nikon OptiStation-V Automated Inspection Station

- Disco DFD6341 Fully Automatic Dicing Saw

- (2) Disco DFD651 Fully Automatic Dicing Saw

- R. Howard Strasbaugh, Inc 6BK-1+6 Polishing/Lapping Machine

- (3) Strasbaugh Instruments 6BK-DC-SP Polishing/Lapping Machine

- Espec ENX11-4CW Environmental Chamber

- 价值$1M+ 的晶圆/切片及抛光设备备品备件

- 以及更多研磨、抛光、切片及其它检测设备

编辑：芯智讯-林子